
BRONKHORST®
Page13DeviceNetinterface 9.17.026
3.3.4 SupervisorObjects
ClassCode30HEX
Thisobjectmodelstheinterface,functionsandbehaviourassociatedwiththemanagementofapplicationobjectsfor
deviceswithinthe“HierarchyofSemiconductorEquipmentDevices”
SUPERVISOROBJECT’SINSTANCEATTRIBUTES(Instance=1)
DEVICE
SUPERVISOR
OBJECT
ATTRI‐
BUTE
ATTRIBUTENAME
SERVICE
CODE
DATATYPE FLOW‐BUS Comment
0x30 0x01 NumberofAttributes 0x0E USINT20
0x30 0x02 AttributeList 0x0E ArrayofUSINT
0x30 0x03 Manufacturer’sDeviceType 0x0E SHORT‐STRING 113,1;Char[6] “MFM"or"MFC”
0x30 0x04 SEMIStandardRevision 0x0E SHORT‐STRING “E54‐0997”
0x30 0x05 Manufacturer’sName 0x0E SHORT‐STRING “BronkhorstHigh‐Tech”
0x30 0x06 Manufacturer’sModel# 0x0E SHORT‐STRING 113,2;Char[14]
0x30 0x07 DigitalMFCSoftwareRevision
Level
0x0E SHORT‐STRING 113,5;Char[5] “V6.XX”
0x30 0x08 DeviceNetHardwareRevision
Level
0x0E SHORT‐STRING 113,7;Char[1] “C”
0x30 0x09 Manufacturer’sSerialNumber 0x0E SHORT‐STRING 113,3;Char[20] Uniqueserialnr.forBHT
instruments
0x30 0x0A DeviceConfiguration 0x0E SHORTSTRING 113,4;Char[16] Manufacturerconfiguration
0x30 0x0B DeviceStatus 0x0E USINT
0x30 0x0C ExceptionStatus 0x0E BYTE
0x30 0x0D ExceptionDetailAlarm 0x0E STRUCT
0x30 0x0E ExceptionDetailWarning 0x0E STRUCT
0x30 0x0F AlarmEnable 0x0E,0x10 BOOL 0‐1
0x30 0x10 WarningEnable 0x0E,0x10 BOOL0‐1
0x30 0x13 LastMaintenanceDate 0x0E DATE 113,11;Char[8] Servicedate
0x30 0x17 RunningHours 0x0E UDINT 118,2 0‐65535
0x30 0x64 InitMode 0x0E,0x10 USINT 0,10 0,64,73,82
0x30 0x65 Monitor 0x0E,0x10 USINT 115,2 0:measure=setpoint
0x30 0x66 Default_Inp_IO_Assembly_Inst 0x0E,0x10 USINT
0x30 0x67 Default_Outp_IO_Assembly_Inst 0x0E,0x10 USINT
Devicestatus
Attributevalue State
0 Undefined
1 Selftesting
2 Idle
3 SelftestException
4 Executing
5 Abort
6 Criticalfault
7‐50 ReservedbyCIP
51‐99 Devicespecific
100‐255 Vendorspecific
ExceptionStatus
Bit
Exceptionstatusbitmap, Bit7setto0
Function
State
0
Devicespecificdefinition
Alarm/device‐common
1 Alarm/device‐specific
2 Alarm/manufacturer‐specific
3 reserved– setto0
4 Warning/device‐common
5 Warning/device‐specific
6 Warning/manufacturer‐specific
7 0=basicmethod 1=ExpandedMethod
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